退火工艺对溶胶凝胶Pb(Zr0.52Ti0.48)O3薄膜残余应力的影响

功能材料, 2007, 38(8): 1260-1264.

退火工艺对溶胶凝胶Pb(Zr0.52Ti0.48)O3薄膜残余应力的影响

杨帆 ^1, , 费维栋 ^2, , 李伟力 ^3, , 高忠民 ^4, , 蒋建清 ^5,

1.东南大学,材料科学与工程学院,江苏,南京,211189;哈尔滨工业大学,材料科学与工程学院,黑龙江,哈尔滨,150001

2.哈尔滨工业大学,材料科学与工程学院,黑龙江,哈尔滨,150001

3.哈尔滨工业大学,材料科学与工程学院,黑龙江,哈尔滨,150001

4.吉林大学,化学学院,吉林,长春,130012

5.东南大学,材料科学与工程学院,江苏,南京,211189

基金项目: 江苏省博士后科学基金(0602001A)

关键词：溶胶凝胶法 , X射线衍射 , 残余应力 , 退火

Effect of annealing conditions on residual stress in sol-gel-derived Pb(Zr0.52Ti0.48)O3 film

使用溶胶凝胶法制备了Pb(Zr0.52Ti0.48)O3 铁电薄膜,分别利用原子力显微镜、X射线衍射及面探扫描技术分析了薄膜的组织结构,并运用掠入射X射线衍射法研究了不同工艺条件下制备的薄膜的残余应力.研究表明溶胶凝胶薄膜在600℃退火30min后完全晶化,组织结构均匀.不同工艺下制备的薄膜均受残余拉应力,随着退火温度及退火时间的延长,薄膜中的残余应力逐渐增大,而随着薄膜厚度的增加,残余应力先增大然后减小.

参考文献

[1]	Whatmore R W;Zhang Q;Huang Z R et al.[J].Mater Sci Sem Pro,2005,5:65-76.
[2]	Scott J F.Ferroelectric Memories[M].北京:清华大学出版社,2004
[3]	Contreras J R;Kohlstedt H .[J].Applied Physics Letters,2003,83:126-128.
[4]	Shaw T M;Suo Z;Huang M et al.[J].Applied Physics Letters,1999,75:2129-2130.
[5]	Spierings G A C M;Dormans G J M;Moors W G J .[J].Journal of Applied Physics,1997,78:1926-1933.
[6]	Pierre D L.Introduction to Sol-Gel Processing[M].USA:Academic Press,1998
[7]	Gong W;Li J F;Chu X et al.[J].Journal of the European Ceramic Society,2004,24:2977-2985.
[8]	Onga R J;Berfield T A;Sottos N R et al.[J].Journal of the European Ceramic Society,2005,25:2247-2251.
[9]	Yao K;Yu S;Tay F E H .[J].Applied Physics Letters,2003,82:4540-4542.
[10]	Ramesh R;Gilchrist H;Sands T et al.[J].Applied Physics Letters,1993,63:3592-3594.
[11]	Sch(a)fer J D;N(a)fe H;Fdlnger F .[J].Journal of Applied Physics,1999,85:8023-8031.
[12]	Ma CH.;Huang JH.;Chen H. .Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(2):73-78.
[13]	Brennan S.;Leung OS.;Nix WD.;Munkholm A. .X-ray measurements of the depth dependence of stress in gold films[J].Physica, B. Condensed Matter,2000(1/3):125-129.
[14]	Gelfi M;Bontemqi E;Roberti R et al.[J].Acta Materialia,2004,52:583-589.
[15]	马礼敦.近代X射线多晶体衍射[M].北京:化学工业出版社,2004
[16]	Bruker A X S.GADDS User's Manual[M].Medison:Bruker AXS Inc,1999
[17]	Rodriguez-Navarro AB .XRD2DScan: new software for polycrystalline materials characterization using two-dimensional X-ray diffraction[J].Journal of Applied Crystallography,2006(6):905-909.
[18]	Yang F;Zheng F;Fei W D .[J].Key Engineering Materials,2005,280-283:857-860.
[19]	丛秋滋.多晶二维X射线衍射[M].北京:科学出版社,1997
[20]	W.L. Li;W.D. Fei;T. Hanabusa .Effect of deposition condition on residual stress of iron nitride thin films prepared by magnetron sputtering and ion implantation[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2006(8):2847-2852.
[21]	Zheng X J;Li J Y;Zhou Y C .[J].Acta Materialia,2003,51:3985-3991.
[22]	Sengupta SS.;Payne DA.;Allen LH.;Park SM. .Origins and evolution of stress development in sol-gel derived thin layers and multideposited coatings of lead titanate[J].Journal of Applied Physics,1998(4):2291-2296.

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退火工艺对溶胶凝胶Pb(Zr0.52Ti0.48)O3薄膜残余应力的影响

Effect of annealing conditions on residual stress in sol-gel-derived Pb(Zr0.52Ti0.48)O3 film

参考文献