采用不同的磁控溅射和回火工艺制备了SmCo磁性薄膜.用能谱仪对不同工艺溅射的样品进行了化学成分分析; 用透射电子显微镜和振动样品磁强计(VSM)研究了薄膜的显微结构和磁性能.结果表明: 溅射态的薄膜为非晶态并具有软磁特征; 当回火温度位于400～ 450℃之间时, 薄膜的微观组织均匀细小, 且随着回火温度增加, 矫顽力增大, 并在450℃回火的样品中得到了最大的矫顽力.回火温度500℃后, 薄膜微观组织中晶粒出现了不均匀粗化, 矫顽力明显降低.
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