利用扫描电镜观察了CVD自支撑金刚石薄膜的表面形貌组织,利用X射线衍射技术检测了薄膜织构。研究表明,不同衬底温度条件下制备的金刚石薄膜形成不同的织构和表面形貌组织,衬底温度升高使生长速率参数α减小,金刚石晶体最快生长晶向由〈100〉晶向向〈011〉和〈111〉晶向转变,使得薄膜中{011}和{111}织构随温度提高不断增强。高频率孪晶使薄膜中没有形成{100}织构,而是形成了{122}和{522}织构。
The surface morphology of CVD diamond film was observed by SEM and the texture was tested by XRD.It shows that different substrate temperatures induce different textures and surface morphology,the rise of substrate temperature results in the decrease of the growth velocity parameter α,the most fast growth direction changes from〈 100〉 crystal direction to 〈011〉 and〈 111〉 crystal directions,which make the {011} and {111} textures strengthen.{100} textures does not form because of the high frequency twins,which induce the formation of {122} and {522} textures.
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