电液动力微泵的实验分析

工程热物理学报 , 2009, 30(5): 857-859.

1.传热强化与过程节能教育部重点实验室及传热与能源利用北京市重点实验室,北京工业大学,北京,100022

2.传热强化与过程节能教育部重点实验室及传热与能源利用北京市重点实验室,北京工业大学,北京,100022

3.传热强化与过程节能教育部重点实验室及传热与能源利用北京市重点实验室,北京工业大学,北京,100022

4.传热强化与过程节能教育部重点实验室及传热与能源利用北京市重点实验室,北京工业大学,北京,100022

基金项目: 国家自然科学基金(50676001)

EXPERIMENTAL ANALYSIS ON EELECTRO- HYDRODYNAMIC MICROPUMP

本实验运用MEMS技术在硅片上加工了一种新型电子冷却微泵-电液动力微泵,微泵由一组平面电极组成,施加直流来驱动流体.相关实验研究表明微泵的性能与施加电压、工作介质,电极结构和材料以及工作环境有关.

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