采用射频磁控溅RF-magnetron sputting)法制备了钛酸锶钡(BST)薄膜,用快速热处理(RTA)和常缮规热处理(CFA)对薄膜进行晶化.利用AFM、XRD等技术分析了钛酸锶钡薄膜的晶化过程,以及不同退火温度和退火方法下薄膜的晶粒、晶相特性.实验表明:钛酸锶钡薄膜在500℃开始结晶,到700℃左右时结晶比较完善,晶化过程中没有出现择优取向;从表面形貌和X射线衍射图综合分析,快速退火的晶化效果要优于常规退火.
参考文献
| [1] | Scott J.F. .Ferroelectric Memories Today[J].Ferroelectrics: Letters Section,2000(1/4):247-258. |
| [2] | MajumderS;Martinez A;Katiyar R S et al.Sol-gelderivedgrainorientedbariumstrontiumthinfilmforphaseshifterapplication[J].Journal of Applied Physics,2001,90(02):896. |
| [3] | ZimmermannF;Voigts M;Weil C et al.Investigation of barium strontium titanate thick films for tunable phase shifters[J].Journal of the European Ceramic Society,2001,21(10-11):2019. |
| [4] | SchlossLF;Haller .TheeffectofgrowthtemperatureonpulsedlaserdepositedBa,SrTiO3thinfilmsdesignedforpyroelectricfar-infrareddetectorapplications[J].Integrated Ferroelectrics,1999,25(1-4):443. |
| [5] | ChenXiaofeng;Lu Wenqing;Zhu Weiguang et al.Structural and thermal analyses on phase evolution of sol-gel Ba, SrTiO3 thin films[J].Surface and Coatings Technology,2003,167(2-3):203. |
| [6] | B. Panda;A. Dhar;G. D. Nigam;D. Bhattacharya;S. K. Ray .Optical properties of RF sputtered strontium substituted barium titanate thin films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1998(1/2):46-49. |
| [7] | Wu D.;Ling HQ.;Yin XB.;Ge CZ.;Wang M.;Ming NB.;Li AD. .Preparation of (Ba0.5Sr0.5) TiO3 thin films by sol-gel method with rapid thermal annealing[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(4):309-314. |
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