用动态原位电镜观察方法研究了直流溅射Fe_(82)Si_(6)B_(12)非晶合金膜的晶化动力学过程结果表明:溅射Fe_(82)Si_6B_(12)非晶合金膜的晶化类型为初晶晶化,初晶产物为α(Fe,Si)长大以枝晶方式进行,长大方向沿<110>晶向.α(Fe,Si)初晶形核采取瞬态均匀形核,晶核初始的形状为圆形和多角形,并很快发展成枝晶.α(Fe,Si)枝晶的长大是由B原子在非晶合金中的长程扩散控制的,根据对长大过程的动力学分析,得到了B原子在溅射Fe_(82)Si_(6)B_(12)非晶合金膜中的自扩散系数,且扩散系数与退火温度之间符合Arrhenius关系.
In situ observation under TEM was carried out on the crystallization of prima-ry crystalline α(Fe, Si) in the sputtering Fe_(82)Si_6B_12 amorphous alloy film. The growth ofa(Fe,Si) is of dendritic morphology along <110> orientation. The nucleation of primarycrystalline a(Fe,Si) may be transient homogeneous, in circular or polygonal shape and to berapidly growing into dendrites. The growth of the α(Fe,Si) dendrites is controlled bylong-range diffusion of B atoms in the amorphous alloy. The self-diffusion coefficient of Batom in the sputtering Fe_(82)Si_6B_(12) amorphous alloy film together with the Arrhenius relationbetween diffusion coefficient and annealing temperature were obtained on the basis of kineticanalysis of its growing process.
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