TaN/NbN multilayered coatings with nanoscale bilayer periods were synthesized at different Ar/N2 flow rate by r.f. magnetron sputtering. XRD and nano indenter were employed to investigate the influence of Ar/N2 flow rate on microstructure and mechanical properties of the coatings. The low-angle XRD pattern indicated a well-defined composition modulation and layer structure of the multilayered coating. All multilayered coatings almost revealed higher hardness than the rule-of-mixtures value of monolithic TaN and NbN coatings. At FAr:FN2 =10, the multilayered coating possessed excellent hardness, elastic modulus, internal stress, and fracture resistance, compared with ones synthesized at other Ar/N2 flow rates. The layered structure with strong mixture of TaN (110), (111), (200) and Nb2N (101) textures should be related to the enhanced mechanical properties.
参考文献
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%