采用离子束溅射沉积(IBSD)法在聚酰亚胺衬底上沉积不同厚度Sm-Fe GMFs;采用磁致伸缩测量仪测试制备态和不同温度真空退火后薄膜悬臂梁结构自由端偏转量;利用赫姆霍兹系统测量制备态和真空退火后薄膜的幅频特性.结果表明:在低频(0～100 Hz)范围内,检测到悬臂梁结构Sm-Fe GMFs共振现象,薄膜经过200 ℃真空退火后,其低场磁敏性明显提高,在74.1 Hz的频率下发生共振,其振幅可达到300 μm,比制备态时提高了约3倍;制备的Sm-Fe GMFs显示出优异的幅频特性,振动与驱动电流的响应曲线表现出很好的跟随性.
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