利用波长为172nm的真空紫外光刻蚀技术(Vacuum ultraviolet lithography,VUV)对聚甲基丙烯酸甲酯(PMMA)薄膜的表面进行了图案化微加工,并采用扫描电镜和原子力显微镜对微图案化的PMMA膜的表面形貌进行了表征.此外,还通过跟踪测试真空紫外光照后PMMA膜表面随时间变化的水接触角研究了表面的亲疏水性.结果表明,利用该方法可以成功地在PMMA基材上一次性制备出保真度较好的亚微米级微流道,而且使微流道内表面具有稳定持久的亲水性.
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