SiNx:H薄膜因为具有良好的减反射性质和钝化作用,在晶体硅太阳电池(单晶硅、多晶硅)的研究和生产中得到越来越广泛的应用.介绍了SiNx:H薄膜在硅基太阳电池中的减反射和钝化作用,主要制备方法等研究现状,以及面临的问题和今后的研究趋势.
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