产生薄膜应力是在沉积薄膜过程中普遍存在的现象.薄膜应力的存在将影响薄膜的微观结构和性能,如薄膜的光学、力学等物理性能.同时影响到薄膜与基体材料的结合度以及基体材料的基本性能.主要总结了薄膜应力的产生机理、测试方法及其对薄膜结构和性能的影响,同时对薄膜应力的有效控制提出了展望.
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