SmCo/Cu, SmCo/Mo, SmCo/Al magnetic granular films were fabricated by different DC magnetron sputtering. The mean compositions of the films were investigated with EDAX. The magnetic properties of the films were tested by VSM. The Microstructures of the films as--deposited and annealed at 500℃ for 30 min were observed by TEM. The results show that the SmCo/Cu granular films as--deposited are already crystal as sputter whereas the SmCo/Mo and SmCo/Al granular films as--deposited are amorphous. After annealed at 500℃ for 30 min, the magnetic precipitated phases are different. The different magnetic matrix show different magnetic properties and the film with the Cu matrix has the best magnetic properties in those matrix. The reason is that the Cu can gather and anchoring in the grain boundary.
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