在低合金钢基体上磁控溅射镀Cr/Cu双层膜,电沉积铜-金刚石复合过渡层,在热丝CVD系统中沉积了连续的金刚石膜.用压痕实验研究了所沉积的金刚石膜/基结合性能,用扫描电镜(SEM)、X射线(XRD)、拉曼光谱表征了金刚石膜的表面形貌、相结构和内应力.结果表明,经CVD金刚石沉积后Cr层转化为铬铁碳化物层,阻止了Fe对界面金刚石的石墨化,并部分缓冲相变应力；较软的Cu层能有效缓解相变应力和热应力,降低了所沉积的金刚石膜内应力；用441N载荷对所沉积的金刚石膜进行压痕评估,压痕外缘只产生环状裂纹,表明膜基结合力较高.
参考文献
| [1] | S.E.Coe,R.S.Sussmann,Optical,thermal and mechanical properties of CVD diamond,Diamond and Related Materials,9(9/10),1726 (2000) |
| [2] | J.G.Buijnsters,P.Shankar,W.Fleischer,W.Fleischer,W.J.P.Van Enckevort,J.J.Schermer,J.J.Ter Meulen,CVD diamond deposition on steel using arc-plated chromium nitride interlayers,Diamond and Related Materials,11(3/6),536(2002) |
| [3] | F.J.G.Silva,A.J.S.Femandes,F.M.Costa,A.P.M.Baptista,E.Pereira,A new interlayer approach for CVD diamond coating of steel substrates,Diamond and Related Materials,13(4/8),828(2004) |
| [4] | F.J.G.Silva,A.J.S.Femandes,F.M.Costa,A.P.M.Baptista,E.Pereira,Unstressed PACVD diamond films on steel pre-coated with a composite multilayer,Surface and Coatings Technology,191(1),102(2005) |
| [5] | F.J.G.Silva,A.P.M.Baptista,E.Pereira,V.Teixeir,Q.H.Fan,A.J.S.Femandes,F.M.Costa,Microwave plasma chemical vapour deposition diamond nucleation on ferrous substrates with Ti and Cr interlayers,Diamond and Related Materials,11(9),1617(2002) |
| [6] | J.G.Buijnsters,P.Shankar,P.Gopalakrishnan,W.J.P.Van Enckevort,J.J.Schermer,S.S.Ramakrishnan,J.J.Ter Meulen,Diffusionmodified boride interlayers for chemical vapour deposition of lowresidual-stress diamond films on steel substrates,Thin Solid Films,426(1/2),85(2003) |
| [7] | Y.S.Li,Y.Tang,Q.Yang,C.Xiao,A.Hirose,Diamond deposition on steel substrates with an A1 interlayer,International Journal of Refractory Metals and Hard Materials,27(2),417(2009) |
| [8] | S.Schwarz,S.M.Rosiwal,Y.Musayev,R.F.Singer,High temperature diffusion chromizing as a successful method for CVD-diamond coating of steel—part Ⅱ,Diamond and Related Materials,12(2003):701-706 |
| [9] | J.C.Bareiβ,G.Hackl,N.Popovska,S.M.Rosiwal,R.F.Singer,CVD diamond coating of steel on a CVD-TiBN interlayer,Surface and Coatings Technology,201(2006):718-723 |
| [10] | QIU Wanqi,CHEN Xingting,LIU Zhongwu,ZHONG Xichun,YU Hongya,ZENG Dechang,Latest progress in synthetic inlay structured diamond coatings,Chinese Journal of Vacuum Science and Technology,31 (6),691 (2011)(邱万奇,陈星婷,刘仲武,钟喜春,余红雅,曾德长,镶嵌结构界面金刚石涂层研究进展,真空科学与技术学报,31(6),691(2011) |
| [11] | C.R.Lin,C.T.Kuo,Improvement of mechanical properties of electroplated diamond tools by microwave plasma CVD diamond process,Surface and Coatings Technology,110(1/2),19(1998) |
| [12] | Leticia W.De Resende,Evaldo J.Corat,Airoldi Vladimir J.Trava,Nelia F.Leite,Multi-layer structure for chemical vapor deposition diamond on electroplated diamond tools,Diamond and Related Materials,10(3/7),332(2001) |
| [13] | A.K.Sikder,D.S.Misra,D.Singhbal,S.Chakravorty,Surface engineering of metal-diamond composite coatings on steel substrates using chemical vapour deposition and electroplating routes,Surface and Coatings Technology,114(2),230(1999) |
| [14] | R.Polini,G.Mattei,R.Valle,F.Casadei,Raman spectroscopy characterization of diamond films on steel substrates with titanium carbide arc-plated interlayer,Thin Solid Films,515(2006):1011 |
| [15] | W.Fortunato,A.J.Chiquito,J.C.Galzerani,J.R.Moro,Crystalline quality and phase purity of CVD diamond films studied by Raman spectroscopy,Journal of Materials Science,42(17),7331 (2007) |
| [16] | Ali Nasar,Hua Fan Qi,J.Gracio,E.Pereira,Waqar Ahmed,A comparison study of diamond adhesion on ductile metals,Thin Solid Films,377/378,193(2000) |
| [17] | Chii Ruey Lin,Cheng Tzuo Kuo,Ruey Ming Chang,Improvement in adhesion of diamond films on cemented WC substrate with Ti-Si interlayers,Diamond and Related Materials,7(11/12),1628(1998) |
| [18] | Joost J.Vlassak,M.D.Drory,W.D.Nix,A simple technique for measuring the adhesion of brittle films to ductile substrates with application to diamond-coated titanium,Journal of Materials Research,12(7),1900(1997) |
| [19] | W.Q.Qiu,A.Dasari,Y.W.Mai,Improvement in adhesion of diamond film on Cu substrate with an inlay structured interlayer,Surface and Coatings Technology,206(2/3),224(2011) |
| [20] | SUN Peizhen,ZHAO Jiansheng,CHEN Yuqiu,CHEN Jianzhang,Investigation of the heat treatment of a high toughness-strength and low alloying cold working die steel,Heat Treatment of Metals,8,47(1989)(孙培祯,赵建生,陈钰秋,陈建章,高强韧低合金冷模具钢(GD钢)热处理工艺的研究,金属热处理,8,47(1989)) |
| [21] | CUI Zhenduo,LIU Huashan,Metal Materials and Heat Treatment (Changsha,The Press of Zhongnan University,2010)p.70(崔振铎,刘华山,金属材料及热处理(长沙:中南大学出版社,2010)p.70) |
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