研制了一种新型的与可伐熔封的ZnO-Al_2O_3-B_2O_3-SiO_2系微晶玻璃,研究了不同工艺条件下微晶玻璃与可伐合金间的润湿角大小,结果表明,熔封气氛和熔封温度对润湿性能影响很大,熔封时间影响最小.采用最佳的工艺条件,其润湿性能与现有的其它玻璃润湿性能相似.同时发现玻璃与可伐合金间的润湿角保持在10°～30°之间能得到质量良好的熔封产品.在基本不改变传统工艺制度的条件下,可完成锌铝硼硅系微晶玻璃与可伐合金的熔封,即利用排蜡过程同时完成微晶玻璃的形核,熔封后在稍低温度保温或减慢冷却速度可以完成微晶玻璃的结晶过程.锌铝硼硅系微晶玻璃与预氧化可伐合金的封接依靠玻璃中的SiO_2与FeO或Fe_3O4发生界面反应形成牢固的结合.
A new type of ZnO-Al_2O_3-B_2O_3-SiO_2 system glass-ceramics used for sealing with Kovar alloy was developed. Wetting angles between Kovar and glass-ceramics under different processing condition were measured. It is found that atmosphere and temperature were the most important factors affecting the wetting angle, while the holding time in same sealing atmosphere has little effect on wetting angle. It is also found that the wetting angle between glass-ceramics and Kovar alloy should be maintained in the range of 10°～30° in order to achieve excellent sealing properties. With little change of conventional process, good quality of sealing for the glass-ceramics and Kovar alloy can be achieved through two major steps. First, the process of burning out binder is also the process of nucleation in glass-ceramics. Second, the process of crystallization is achieved through holding the glass-ceramics at a lower temperature or slower cooling rate. The reaction between SiO2 and FeO or Fe_3O_4 insures strong adhesion between glass-ceramics and pre-oxidized Kovar alloy.
参考文献
| [1] | 《中国电子学会生产技术学分会丛书》编委会.微电子封装手册[M].北京:电子工业出版社,2001 |
| [2] | 《中国电子学会生产技术学分会丛书》编委会.微电子封装技术[M].合肥:中国科学技术大学出版社,2003 |
| [3] | 高尚通;赵正平.微电子封装在中国的发展趋势[A].上海,1999:1-10. |
| [4] | 马英仁.封接玻璃（一）--对玻璃的要求及适于封接的金属[J].玻璃与搪瓷,1992(04):58. |
| [5] | Donald W .Preparation、properties and chemistry of glass and glass-ceramic-to-metal seals and coatings[J].Journal of Materials Science,1993,28(11):2841-2886. |
| [6] | 龚方田;周(罄) .锌铝硼硅酸盐七元系玻璃微晶化过程探讨[J].特种玻璃,1986,3(03):21-27. |
| [7] | 张为军,堵永国,陈朝辉,胡君遂,杨娟.微晶玻璃及其在电子元件中的应用[J].电子元件与材料,2002(08):26-28,34. |
| [8] | WU Mao,沈卓身.ZnO-Al2O3-B2O3-SiO2系微晶玻璃的研究[J].材料热处理学报,2008(04):35-38. |
| [9] | Chern TS;Tsai HL .Wetting and sealing of interface between 7056 Glass and Kovar alloy[J].Materials Chemistry and Physics,2007(2/3):472-478. |
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