A method is introduced to determine the depth distribution of the residual stresses in (Ti,Al)N films. The films were gradually stripped by chemical corrosion, an optical system was designed to test the curvature change of the specimens, and the depth distribution of the residual stresses was calculated. The results show that the residual stresses increase gradually from the interface of film/substrate and reach a maximum value at the middle region, then decrease until the surface.
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