为了深入了解Ti-Si-N纳米复合表面的力学性能,尝试采用有限元方法对纳米压痕测量的加一卸载过程进行了模拟.详细介绍了该三维有限元仿真过程的各个细节,包括对标准Berkovieh压头的建模和相关参数的确定,以及对Ti-Si-N表面模型边界条件、压头与表面接触方式和加一卸栽方式的处理.采用有限元的非线性算法对一个Ti-Si-N表面纳米压痕测量的实验曲线进行了拟合.通过有限元仿真得到了Ti-Si-N样品的屈服极限和应力-应变关系.该研究表明,采用有限元仿真与纳米压痕测量相结合是研究纳米复合表面非线性塑性性能的有效方式.
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