采用垂直Bridgman方法生长的CdZnTe晶体,定向切割成12 mm×7 mm×2.5 mm单晶片.通过研磨、抛光、腐蚀、电极制备、钝化、退火等一系列工艺,制成了Au/CdZnTe/Al平面探测器.重点研究了快速退火对电极接触特性的影响.测试了Au/CdZnTe/Al平面探测器的能谱响应特性.结果表明:在室温偏压为350 V条件下,探测器的241Am 59.54 keV光谱能量分辨为3.95%(2.35 keV FWHM).
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