以单晶硅片(100)为衬底,尿素-甲醇有机溶液为沉积液,用电化学沉积的方法在阴极制备出CNx薄膜.通过AFM、XPS、Raman光谱和FTIR光谱对得到的CNx薄膜的表面形貌和微观结构进行了表征,并在球-盘摩擦试验机上考察了薄膜的干摩擦性能,用SEM和EDS对摩擦表面进行了分析,研究了摩擦机理.结果表明:薄膜表面致密,但粗糙度较大;Raman光谱中出现明显的D峰和G峰,说明薄膜具有无定形的结构特征;薄膜的化学元素组成主要为C,还有少量的N,C、N原子之间主要以共价单键和双键形式结合.CNx薄膜与红宝石球对摩时,摩擦系数随频率的增大而升高,但几乎不随载荷而变化;CNx薄膜在形成转移膜的过程中不仅失去了N,而且发生了石墨化,这与DLC膜的摩擦过程非常相似.
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