采用磁控溅射法在玻璃衬底上沉积Cu-In合金预置膜,采用固态硫源在N2气氛下硫化热处理的方法制备了CuInS2薄膜.研究了硫化温度对CuInS2薄膜的晶相结构、表面形貌和光学带隙等性能的影响.采用X射线衍射(XRD)、场发射扫描电镜(FE-SEM)、紫外-可见光谱(UV-Vis)等测试手段对薄膜的晶相结构、表面形貌、光学性能进行了表征.结果表明,Cu-In合金预置膜经550℃硫化热处理20min可制备出黄铜矿结构的CuInS2薄膜,并具有(112)面的择优取向,所制备的CuInS2薄膜晶粒粒径约为1μm,光学带隙为1.51eV.
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