研究了Al含量对(Ti,Al)N薄膜微观结构与性能的影响.实验结果表明:同TiN薄膜相同,在(Ti,Al)N系薄膜中存在着(111)、(200)和(220)三种择优取向。随着Al含量的增加这三种取向的衍射强度呈不同的变化趋势,而这三种取向的面间距则都呈先降后升的趋势,利用上述微观结构的变化可合理地解释(Ti,Al)N薄膜的硬度随Al含量的增加呈先升后降的现象
The effects of Al content on microstructures and properties of(Ti,Al)N coatings were investigated.It is shown that there are three competitive preferred orientations in (Ti,Al)N,their diffraction intensity have different cbange tendency with increasing of
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