采用溶胶-凝胶匀胶法制备锆钛酸铅铁电薄膜,研究了前驱体影响因素(如有机溶剂、前驱单体加入顺序、添加剂)、溶胶影响因素(如溶胶浓度、pH值)、匀胶速度和退火温度对成膜质量及薄膜微结构、铁电性的影响.结果表明:采用乙二醇甲醚为溶剂对pb2+、Zr4+和Ti4+金属盐进行溶解优于乙醇和乙二醇,但由于乙二醇甲醚对硝酸锆的溶解性差,对硝酸锆应先用乙醇溶解再加入乙二醇甲醚的方法来进行溶解;以硝酸锆为Zr源配制溶胶时,只有先将Pb前驱液滴加到Ti前驱液中,然后再滴入Zr前驱液的方式才能得到澄清前驱体.将锆钛酸铅溶胶浓度和pH值分别控制在0.2～0.3 mol/L和2～3较为适宜,与此溶胶相适应的匀胶参数:转速为4000 r/min,时间为60 s.随退火温度升高,薄膜的晶化程度增加,且逐渐表现出(100)晶面择优取向,晶格常数c和四方率c/a逐渐增加,而晶格常数a逐渐减小;随退火温度升高,晶粒尺寸逐渐增大,使得剩余极化强度逐渐增加,矫顽场强逐渐减小.当退火温度为850 ℃时制备的锆钛酸铅薄膜具有均匀的晶粒、较低的表面粗糙度和最为优异的铁电性.
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