论述了ZnO薄膜p型转变的难点及其解决方法的最新研究进展,并讨论了Al+N+H共掺杂生长p-ZnO薄膜的掺杂机制,提出多层缓冲层生长工艺以实现p-ZnO薄膜的可控掺杂,进而优化薄膜性能.
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