以电感耦合等离子体(ICP)刻蚀工艺制备单晶硅微齿轮陈列模具,采用热丝法化学气相沉积(HFCVD)制备出结构精细的金刚石微齿轮,其齿顶圆直径约1.55 mm、齿轮厚度10μm.应用扫描电镜分别观察了ICP刻蚀的硅微齿轮模具及CVD金刚石微齿轮,表明齿轮微结构形貌精细,金刚石微齿轮较好地复制了硅微细结构；Raman光谱分析表明微齿轮的金刚石质量较高.此工艺可以实现金刚石薄膜的精细图形化,为面向微机械应用的金刚石器件的经济批量制备提供了一种途径.
参考文献
| [1] | A.R. Krauss;O. Auciello;D.M. Gruen;A. Jayatissa;A. Sumant;J. Tucek;D.C. Mancini;N. Moldovan;A. Erdemir;D. Ersoy;M.N. Gardos;H.G. Busmann;E.M.Meyer;M.O. Ding .Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices[J].Diamond and Related Materials,2001(11):1952-1961. |
| [2] | Xiao X;Birrell J;Gerbi JE;Auciello O;Carlisle JA .Low temperature growth of ultrananocrystalline diamond[J].Journal of Applied Physics,2004(4):2232-2239. |
| [3] | Kohn E. .Diamond MEMS-a new emerging technology[J].Diamond and Related Materials,1999(2 Mar):934-940. |
| [4] | Jingchun Zhang;Jerry W. Zimmer;Roger T. Howe .Characterization of boron-doped micro- and nanocrystalline diamond films deposited by wafer-scale hot filament chemical vapor deposition for MEMS applications[J].Diamond and Related Materials,2008(1):23-28. |
| [5] | X. D. Wang;G. D. Hong;J. Zhang;B. L. Lin;H. Q. Gong;W. Y. Wang .Precise patterning of diamond films for MEMS application[J].Journal of Materials Processing Technology,2002(2):230-233. |
| [6] | Bj(o)rkman H;Rangsten P;Hollman P et al.Diamond Replicas from Microstructured Silicon Masters[J].Sensors and Actuators B: Chemical,1999,73(1-2):24-29. |
| [7] | HE Zhoutong,YANG Shumin,LI Qintao,ZHU Dezhang,GONG Jinlong.Selective growth of diamond by hot filament CVD using patterned carbon film as mask[J].核技术(英文版),2008(02):83-87. |
| [8] | Fu Y Q;Du H J;Miao J M .Patterning of Diamond Microstructure on Si Substrate by Bulk and Surface Micromachining[J].Journal of Materials Processing Technology,2003,132(1-3):73-81. |
| [9] | Zongliang Cao;Dean Aslam .Fabrication technology for single-material MEMS using polycrystalline diamond[J].Diamond and Related Materials,2010(10):1263-1272. |
| [10] | 丁桂甫,曹莹,李新永,蒋振新.CVD金刚石薄膜的微机械加工技术研究进展[J].金刚石与磨料磨具工程,2003(01):6-11. |
| [11] | 莘海维,奚正蕾,凌行,张志明.金刚石薄膜图形化技术的研究[J].航空精密制造技术,2002(01):9-12. |
| [12] | G.E Ding;H.R Mao;Y.L. Cai .Micromachining of CVD diamond by RIE for MEMS applications[J].Diamond and Related Materials,2005(9):1543-1548. |
| [13] | Maria D. Stoikou;Phillip John;John I.B. Wilson .Unusual morphology of CVD diamond surfaces after RIE[J].Diamond and Related Materials,2008(7/10):1164-1168. |
| [14] | Takatoshi Yamada;Hiromichi Yoshikawa;Hiroshi Uetsuka .Cycle of two-step etching process using ICP for diamond MEMS applications[J].Diamond and Related Materials,2007(4/7):996-999. |
| [15] | H. Uetsuka;T. Yamada;S. Shikata .ICP etching of poly crystalline diamonds: Fabrication of diamond nano-tips for AFM cantilevers[J].Diamond and Related Materials,2008(4/5):728-731. |
| [16] | M. Bernard;A. Deneuville;L. Ortega .Electron cyclotron resonance oxygen plasma etching of diamond[J].Diamond and Related Materials,2004(2):287-291. |
| [17] | Aslam M;Schulz D .Technology of Diamond Microelectomechnical Systems[J].Technical Digest:Sth Int Conf Solid-State Sensor & Actu,1995,2:222-224. |
| [18] | 卓敏,贾世星,朱健,张龙.用于微惯性器件的ICP刻蚀工艺技术[J].传感技术学报,2006(05):1381-1383. |
| [19] | 吕垚,李宝霞,万里兮.硅深槽ICP刻蚀中刻蚀条件对形貌的影响[J].微电子学,2009(05):729-732. |
| [20] | 匡同春;刘正义 .激光拉曼光谱在CVD金刚石薄膜质量表征中的应用[J].理化检验-物理分册,1997,33(07):21-25. |
| [21] | 袁佳晶,卢文壮,王红军,徐锋,左敦稳.基于模型复制法的金刚石微结构制备研究[J].人工晶体学报,2010(05):1141-1145. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%