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  4. 提高CVD金刚石薄膜附着力的方法及其研究进展

材料导报, 2008, 22(3): 85-89.

提高CVD金刚石薄膜附着力的方法及其研究进展

周秋霞 1, , 史新伟 2, , 靳慧智 3, , 姚宁 4, , 王新昌 5,

1.郑州大学物理工程学院材料物理教育部重点实验室,郑州,450052

2.郑州大学物理工程学院材料物理教育部重点实验室,郑州,450052

3.郑州大学物理工程学院材料物理教育部重点实验室,郑州,450052

4.郑州大学物理工程学院材料物理教育部重点实验室,郑州,450052

5.郑州大学物理工程学院材料物理教育部重点实验室,郑州,450052

基金项目:   郑州大学培育基金   河南省科技攻关项目(0624250014)  

关键词： 金刚石薄膜 , 附着力 , 预处理 , 过渡层 , 沉积条件

Methods and Research Development of Improving Adhesion Strength between CVD Diamond Films and Substrates

概述了金刚石薄膜与衬底附着力研究的最新进展,详细讨论了衬底材料的性质、衬底预处理方法、过渡层、负偏压以及CVD沉积条件对金刚石薄膜附着力的影响,总结出提高附着力的主要方法,并分析了金刚石薄膜的应用状况,指出了扩大金刚石薄膜应用的新方向及存在的主要问题.

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