激光辐照诱导氧化铝陶瓷基板表面化学镀铜

材料热处理学报, 2014, 35(10): 184-188.

激光辐照诱导氧化铝陶瓷基板表面化学镀铜

卢泽龙 ^1, , 罗来马 ^2, , 黄新民 ^3, , 谌景波 ^4, , 程继贵 ^5, , 朱流 ^6, , 吴玉程 ^7,

1.合肥工业大学材料科学与工程学院,安徽合肥230009

2.合肥工业大学材料科学与工程学院,安徽合肥230009;安徽省有色金属材料与加工工程实验室,安徽合肥230009

3.合肥工业大学材料科学与工程学院,安徽合肥230009;安徽省有色金属材料与加工工程实验室,安徽合肥230009

4.合肥工业大学材料科学与工程学院,安徽合肥230009

5.合肥工业大学材料科学与工程学院,安徽合肥230009;安徽省有色金属材料与加工工程实验室,安徽合肥230009

6.台州学院机械工程学院,浙江台州 318000

7.合肥工业大学材料科学与工程学院,安徽合肥230009;安徽省有色金属材料与加工工程实验室,安徽合肥230009

基金项目: 中央高校基本科研业务费专项资金资助(2012HGQC0032) 国家自然科学基金青年基金(51204064) 浙江省自然科学基金面上项目(LY12E02003) 国际热核聚变实验堆(ITER)计划专项(2014GB121000)

关键词： Al2O3陶瓷基板 , 激光辐照处理 , 化学镀铜

Laser irradiation induced copper layer growth on alumina ceramic by electroless plating

Keywords： ceramic substrate , laser irradiation , electroless copper plating

采用激光辐照处理对Al2O3陶瓷基板进行预处理,经过超声波辅助化学镀在Al2O3陶瓷基板表面成功制备了化学镀铜层.利用场发射扫描电子显微镜(FE-SEM)和能谱(EDS)研究分析了激光辐照预处理前后Al2O3基板表面形貌和Al2O3基板化学镀铜表面以及截面形貌,划痕形貌,并与传统贵金属Pd活化预处理化学镀铜进行对比.试验结果表明:激光辐照处理后Al2O3基板表面出现了大量的微孔和纳米级颗粒凸起,这些表面缺陷易于吸附外来物质成键,实现化学镀铜过程,其中镀层与基底也有较好的结合力;与传统Pd活化预处理化学镀铜对比发现,激光辐照处理避免了繁琐的工艺和贵金属带来的污染,同时生成的化学镀铜层颗粒与颗粒之间融合更好.

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