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  4. 多元高k氧化物材料的研究进展

材料导报, 2009, 23(15): 35-39.

多元高k氧化物材料的研究进展

苏伟涛 1, , 王锦程 2,

1.杭州电子科技大学材料物理研究所,杭州,310018

2.杭州电子科技大学材料物理研究所,杭州,310018

基金项目:   浙江省教育厅科学研究项目(Y20080481)  

关键词： 栅介质薄膜 , 高k材料 , 多元稀土氧化物 , 氮氧化物

Progress in Research of Multi-component High-k Oxide Materials

近年来,多元高k氧化物材料一直是高k材料研究的热点.从材料结构以及物理性能研究方面对多元高k氧化物如多元稀土氧化物、多元过渡金属氧化物、稀土氧化物一过渡金属化合物的最新研究进行了总结.并对高k材料中最有应用潜力的氮氧化物和叠层栅的物理性能和研究状况进行了评述.

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