本文介绍了新近关于合金择优溅射机制的一个新观点.这个观点认为,在AuCu合金中所观测到的择优溅射现象,主要是离子轰击诱发的Gibbs偏析的结果;只有当轰击离子的能量低至几百电子伏、接近溅射的“准阈能”值对,质量效应才起明显的作用。
A new viewpoint on the mechanism of preferential sputtering of Au-Cu alloys suggests that the so-called preferential sputtering in Au-Cu alloys may be caused by the bombardment-induced Gibbsian segregation, but when ion energy decreases to,ward a near-threshold condition, the maBs-correlating preferential sputtering also plays a role.
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