采用溶胶-凝胶法结合旋涂工艺,在石英玻璃衬底上制备了Bi4Si3O12 (BSO)多晶薄膜.通过X射线衍射(XRD)、傅里叶变换红外光谱(FT-IR)、扫描电子显微镜(SEM)、原子力显微镜(AFM)、荧光光谱仪和紫外-可见(UV-Vis)分光光度计表征了薄膜的物相结构、微观形貌及其光学性质,系统研究了制备过程中的溶胶组成和热处理工艺参数对薄膜性能的影响.结果表明,前驱体溶胶经750℃热处理6h可得到单相的BSO薄膜;预热处理可显著改善薄膜的形貌,降低冷却速率可明显减少薄膜裂纹,增强薄膜发光强度;在溶胶中加入乙二醇乙醚可显著提高薄膜的表面平整度;薄膜的透过率随着裂纹数量的减少明显提高.
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