X射线测量高速钢上不同厚度氮化钛涂层残余应力

材料科学与工艺, 2010, 18(3): 415-424.

X射线测量高速钢上不同厚度氮化钛涂层残余应力

弓满锋 ^1, , 乔生儒 ^2, , 卢国锋 ^3, , 姬浩 ^4,

1.西北工业大学超高温结构复合材料国家重点实验室,陕西,西安,710072;湛江师范学院机电工程系,广东,湛江,524048

2.西北工业大学超高温结构复合材料国家重点实验室,陕西,西安,710072

3.西北工业大学超高温结构复合材料国家重点实验室,陕西,西安,710072

4.西北工业大学超高温结构复合材料国家重点实验室,陕西,西安,710072

基金项目: 国家自然科学基金资助项目(50772089) 高等学校学科创新引智计划资助项目(B08040)

关键词： TiN , 涂层 , 多弧离子镀 , 残余应力 , XRD , 涂层厚度

X-ray residual stress analysis in different thickness TiN coatings on high-speed-steel substrates

采用多弧离子镀在AISI M2高速钢(HSS)上沉积了TiN硬涂层,试样中基体厚度为1 mm,涂层厚度分别为3.0、5.0、7.0、9.0和11.0μm.应用X射线衍射(XRD)分析了TiN涂层中残余应力,测量了TiN(220)衍射晶面在五种不同倾斜角(ψ=0°,20.7°,30°,37.8°和45°)下的X射线衍射蜂.结果表明:在3-11μm涂层厚度范围内,TiN涂层中均表现出残余压应力且残余压应力值较大.TiN涂层中残余应力大致分布在-3.22～-2.04 GPa之间,本征应力分布在-1.32～-0.14 GPa,热应力约为-1.86～-1.75 GPa.TiN涂层中残余应力值随涂层厚度变化是非线性增加的,随厚度增加表现出先增大后减小的变化趋势,多项式拟合后发现约在8.5μm厚时残余应力达到最大值.

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