热处理对溶胶凝胶MoO3薄膜特性的影响

功能材料, 2004, 35(3): 357-359.

热处理对溶胶凝胶MoO3薄膜特性的影响

杜开放 ^1, , 吴广明 ^2, , 沈军 ^3, , 周斌 ^4, , 夏长生 ^5,

1.同济大学,波耳固体物理研究所,上海,200092

2.同济大学,波耳固体物理研究所,上海,200092

3.同济大学,波耳固体物理研究所,上海,200092

4.同济大学,波耳固体物理研究所,上海,200092

5.同济大学,波耳固体物理研究所,上海,200092

基金项目: 国家自然科学基金(20133040) 上海市自然科学基金(02ZE14101) 国家自然科学基金(69978017) 国家高技术研究发展计划(863计划)(2002AA842052)

关键词：溶胶-凝胶技术 , MoO3 , 纳米薄膜

Heat-treatment studies of MoO3 thin films prepared by sol-gel process

报道了以钼粉为原料,采用溶胶凝胶技术和旋转镀膜方法,制备MoO3纳米薄膜.采用TG-DSC分析、X射线衍射仪(XRD)、原子力显微镜(AFM)、红外光谱仪等方法分析了薄膜的特性.研究结果表明MoO3薄膜具有纳米颗粒结构,热处理使得MoO3颗粒长大,且表面平整度降低;XRD分析显示,250℃热处理的MoO3粉末已结晶(为α-MoO3),且沿(0k0)方向取向强烈;随热处理温度的升高,MoO3微结构发生了相应的变化,Mo-O(2)、Mo-O(3)键振动吸收增强,且峰位移动.这些变化归因于热处理导致的MoO3颗粒形状、团聚状态的变化以及应变键的产生.

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