综述了TiAlN薄膜、TiAlN纳米多层膜、TiAlN纳米复合薄膜的研究进展,主要介绍了3种薄膜的硬度、摩擦磨损等性能,并对影响其性能的因素进行了分析,提出了薄膜制备所存在的问题,最后对其今后的发展做了展望.
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