研究了Ti/TiN多层膜的显微结构,横截面试样的透射电镜研究和二次离子质谱深度分析均表明,该膜具有周期变化的多层结构,即:基体/FeTi/Ti/Ti_2N/TiN/Ti_2N/Ti/Ti_2N/TiN…Ti/Ti_2N/TiN.制备了压痕试样的断口试样,并用扫描电镜进行了观察.结果表明,多层硬膜在压痕试验时发生形变,出现压痕坑,在其周围形成材料堆积.随着所加载荷的增加,形变区扩大,越过膜/基界面进入基体,引起膜内的层间开裂和在膜/基界面上形成孔洞,研究结果表明,和单层TiN相比,Ti/TiN多层膜具有较好的韧性.
Observations of cross-sectional Ti/TiN film sample under TEM and of respective depth profiling by secondary ion mass spectroscopy showed that a periodic alternate multilayer structure, i.e., substrate/FeTi/Ti/Ti_2N/TiN/Ti_2N/Ti/Ti_2N/TIN…Ti/Ti_2N/TiN, where FeTi and Ti_2N being transition layer, was found during ion plating. SEM fractograph of indentation sample also showed that the hard coating deformed during indentation, an indentation dip and a pile-up of materials around appeared. With the increase of load applied, the deformation region extended beyond film/substrate boundary and into substrate, initiated interlayer cracking in film and formation of hole at film/substrate interface. It seems that the multilayered Ti/TiN film offered better toughness than single layer TiN film.
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