采用多靶反应磁控溅射技术在不同碳靶功率(碳靶功率与碳含量成正比)下制备了WCN纳米复合膜,采用X射线衍射仪、扫描电镜、纳米压痕仪和高温摩擦磨损仪等对薄膜结构和性能进行表征,研究了碳含量对WCN复合膜的影响.结果表明:随碳靶功率即碳含量的增加,薄膜的物相在原单一WN相的基础上,出现了新相WCN,并且晶格常数不断增大,同时薄膜的硬度和弹性模量先升后降,在碳靶功率为120 W时,两者均达到最大值,分别为36.70,409.16 GPa；复合膜的常温摩擦因数和磨损率随碳含量的增加呈现先减小后增大趋势,高温时薄膜的摩擦因数高于常温的；薄膜的主要磨损机理是磨粒磨损.
参考文献
| [1] | Yu Benhai;Wang Chunlei;Song Xuanyu .Structural stability and mechanical property of WN from first-principles calculations[J].Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics,2009(1/2):556-559. |
| [2] | Ospina R;Castillo HA;Benavides V;Restrepo E;Arango YC;Arias DF;Devia A .Influence of the annealing temperature on a crystal phase of W/WC bilayers grown by pulsed arc discharge[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2006(3):373-377. |
| [3] | 董松涛,喻利花,薛安俊,许俊华.TiAlN/CrAlN纳米结构多层膜的结构与性能[J].材料热处理学报,2010(08):121-126. |
| [4] | 喻利花,薛安俊,董松涛,许俊华.Si含量对Ti-Al-Si-N薄膜微结构与力学性能的影响[J].材料热处理学报,2010(07):140-145. |
| [5] | 喻利花,薛安俊,董松涛,许俊华.AlN/NbN纳米结构多层膜的共格异结构外延生长研究[J].物理学报,2010(06):4150-4155. |
| [6] | Y.D. Su;C.Q. Hu;M. Wen .Effects of bias voltage and annealing on the structure and mechanical properties of WC_(0.75)N_(0.25) thin films[J].Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics,2009(1/2):357-364. |
| [7] | Ospina-Ospina, R.;Jurado, J.F.;Vélez, J.M.;Arango, P.J.;Salazar-Enríquez, C.;Restrepo-Parra, E. .Structural and morphological characterization WCxNy thin films grown by pulsed vacuum arc discharge in an argon-nitrogen atmosphere[J].Surface & Coatings Technology,2010(7):2191-2196. |
| [8] | 汪蕾,董师润,尤建飞,喻利花,李学梅,许俊华.Ti（C,N）复合膜和TiN/Ti（C,N）多层膜组织和显微硬度[J].材料热处理学报,2010(02):113-118. |
| [9] | 马元远,王德苗,金浩,郑建潮.工艺参数对磁控溅射金属化薄膜性能的影响[J].真空,2008(04):70-74. |
| [10] | T. Polcar;N. M. G. Parreira;A. Cavaleiro .Tribological characterization of tungsten nitride coatings deposited by reactive magnetron sputtering[J].Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear,2007(5/6):655-665. |
| [11] | Shaha, K.P.;Pei, Y.T.;Martinez-Martinez, D.;Sanchez-Lopez, J.C.;De Hosson, J.T.M. .Effect of process parameters on mechanical and tribological performance of pulsed-DC sputtered TiC/a-C:H nanocomposite films[J].Surface & Coatings Technology,2010(7):2633-2642. |
| [12] | 马大衍,马胜利,徐可为.TiN基纳米复合超硬薄膜的摩擦磨损特性[J].中国表面工程,2004(02):18-25. |
| [13] | Patrick S. M. Dougherty;Randyka Pudjoprawoto;C. Fred Higgs III .An investigation of the wear mechanism leading to self-replenishing transfer films[J].Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear,2011(1):122-132. |
| [14] | Franz, R;Neidhardt, J;Kaindl, R;Sartory, B;Tessadri, R;Lechthaler, M;Polcik, R;Mitterer, C .Influence of phase transition on the tribological performance of arc-evaporated AlCrVN hard coatings[J].Surface & Coatings Technology,2009(8):1101-1105. |
| [15] | Junhu Meng;Jinjun Lu;Jingbo Wang;Shengrong Yang .Tribological behavior of TiCN-based cermets at elevated temperatures[J].Materials Science & Engineering, A. Structural Materials: Properties, Misrostructure and Processing,2006(1/2):68-76. |
| [16] | Gassner G;Mayrhofer PH;Kutschej K;Mitterer C;Kathrein M .Magneli phase formation of PVD Mo-N and W-N coatings[J].Surface & Coatings Technology,2006(6):3335-3341. |
| [17] | Polcar T;Kubart T;Novak R;Kopecky L;Siroky P .Comparison of tribological behaviour of TiN, TiCN and CrN at elevated temperatures[J].Surface & Coatings Technology,2005(1/3):192-199. |
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