在真空炉内以石墨为电极,利用空心阴极辉光放电在20CrNiMo上成功地沉积了类金刚石(Diamond-like carbon,DLC)薄膜.利用激光拉曼(Baman)光谱分析了所制备DLC薄膜的结构;利用原子力显微镜(AFM)分析了DLC薄膜的表面形貌;利用划痕仪测量了DLC薄膜与基体的结合力并用扫描电子显微镜(SEM)观察了划痕形貌;利用球-盘摩擦磨损实验仪对DLC薄膜的耐磨性能进行了研究.结果表明:在本实验工艺条件下沉积的类金刚石薄膜厚度约为0.6μm,薄膜均匀且致密,表面粗糙度Ra为7～8 nm.类金刚石薄膜与基体结合较紧密,临界载荷达到52 N.DLC薄膜具有优良的减摩性,20CrNiMo表面沉积DLC薄膜后摩擦系数为0.15,较20CrNiMo基体的摩擦系数0.50明显减小,耐磨性能得到提高.
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