采用双阴极等离子溅射技术在TC4合金表面制各了纳米晶NiSi2/Ti5Si3复合涂层.利用XRD、SEM和TEM研究了复合涂层的微观组织特征,利用纳米压入和声发射划痕仪考察了复合涂层的硬度、弹性模量以及涂层与基体的结合力.结果表明:纳米晶NiSi2/Ti5Si3复合涂层由外层厚度为7μm的NiSi2沉积层和其下3μm厚的TisSi3扩散层组成,沉积层的平均晶粒尺寸约为40nm,而扩散层的平均晶粒尺寸约为70nm,且存在大量的栅栏状孪晶.纳米晶NiSi2/TisSi3复合涂层硬度呈梯度分布,与基体具有较高的结合强度,其结合力为49N.纳米晶NiSi2/Ti5Si3复合涂层的比磨损率较TC4合金降低一个数量级以上,且对载荷和温度不具敏感性.与TC4合金相比,纳米晶NiSi2/TisSi3复合涂层的腐蚀电流密度降低了两个数量级,且具有更大的容抗弧值.
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