混合价态的锰氧化物Pr1-xCaxMnO3薄膜是近年来国际上超导体以及巨磁电阻领域的研究热点之一.本文采用化学溶液沉积方法在Pt/Ti/SiO2/Si基底上制备出Pr1-xCaxMnO3薄膜,降低了材料成本;前驱体中不使用鳌和剂,简化了工艺.采用XRD、FT-IR、SEM、AFM、EPMA以及俄歇探针仪等方法对所制备的薄膜进行了表征.结果表明,实验中以较低的温度实现了PCMO钙钛矿结构的晶化;薄膜平整光滑致密,各组分分布均匀,C杂质含量处于很低的水平.
Mixed-valent manganites Pr1-xCaxMnO3 are the object of continuously growing interest in the field of superconductors and colossal magnetoresistance (CMR) materials. In this work, Pr1-xCaxMnO3
films were successfully prepared by a novel and simple chemical solution deposition method using Pt/Ti/SiO2/Si as the substrate. X-ray diffraction, FT-IR, SEM, AFM, electron microprobe analysis and
Auger microprobe analysis were adopted for the characterization of the prepared material. It is proved that Pr1-xCaxMnO3 films obtained are of single-phase with perovskite structure. The constituent
elements are homogeneous, and Pr0.7Ca0.3MnO3 particles are densely and compactly distributed in the films.
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