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Experimental results are reported on the primary carburization reaction between the tungsten powder and methane in the induction plasma, and the secondary carburization of the deposit on substrate at high temperature. Optical microscopy and scanning electron microscopy were used to examine the microstructures of starting tungsten powder, carburized powder, and deposit. X-ray diffraction analysis, thermal gravimetric analysis and microhardness measurement were used to characterize the structures and properties of the powder and the deposit. It is found that the primary carburization reaction in the induction plasma starts from the surface of tungsten particles when the particles are melted. Tungsten particles are partially carburized inside the reactive plasma. Complete carburization is achieved through the secondary carburization reaction of the deposit on substrate at high temperature.

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