采用闭合场非平衡磁控溅射离子镀技术制备了掺Cr类石墨镀层,研究了真空退火温度对镀层的硬度、结合强度、摩擦系数和比磨损率的影响规律,通过X射线衍射(XRD)分析了镀层结构随退火温度的变化.结果表明:随退火温度的升高,镀层有新相生成,镀层的膜基结合强度降低,镀层硬度随温度的升高先增加后降低,退火温度为500℃时,镀层显微硬度最大;随退火温度的升高镀层摩擦系数呈现出先降低后升高的变化趋势,比磨损率逐渐增大.
Graphite-like carbon (GLC) coatings doped with Cr element were deposited by closed field unbalanced magnetron sputter ion plating technique. The effects of vacuum annealing temperature on microhardness, adhesion strength, coefficient of friction and tribological properties of the coatings were studied. The microstructure of GLC coatings annealed at different temperatures was analyzed by X-ray diffraction. The results indicate that some new phases are observed in the coatings and coating-substrate adhesion strength decreases, and microhardness of the coatings firstly increases and then decreases with the increasing of annealing temperature. The highest microhardness is obtained for the coatings annealed at 500℃ . Although the specific wear rates of the coatings increase obviously as the annealed temperature increase, the coefficient of friction exhibits decrease first and then increase.
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