本文结合纳米压痕和有限元法确定了横观各向同性ZnO纳米带各方向上的弹性常数.在正向分析过程中,用ABAQUS有限元软件的压电模式大量模拟了纳米带/硅基底体系的压痕实验,得到无量纲方程的具体形式.在反向分析过程中,通过对沉积在硅基底上的ZnO纳米带进行纳米压痕实验,将相关实验数据代入无量纲方程,确定横观各向同性ZnO纳米带各方向上的弹性常数为ET=35GPa,EL=49G Pa和GL=5GPa.
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