利用非对称双极脉冲磁控溅射技术,双极分别接纯铬靶和纯铝靶,通过调整两靶的功率,以反应溅射的方式沉积不同铬铝比的氮化铬铝涂层.研究不同Al含量的氮化铬铝涂层的结构和硬度.所获得的涂层依次为Cr0.95Al0.05N、Cr0.9Al0.1N、Cr0.83Al0.17N和Cr0.75Al0.25N,均为B1NaCl结构,(220)为主要的织构取向.随着涂层中Al含量的增加,涂层表面突起的尺寸逐渐降低,涂层趋于光滑致密;低Al含量涂层为柱状晶结构,随Al含量提高,涂层结构更加致密,并向等轴晶结构转变.涂层硬度随Al含量的提高先增加后降低,Cr0.83Al0.17N涂层表现出最高的硬度,维氏硬度达到33 GPa以上.
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