提出了一种测量硬质薄膜残余应力的新方法——剥层曲率半径法， 并设计了一套光杠杆系统，可以精确测量 镀膜样品因薄膜存在残余应力而造成试片弯曲的曲率半径， 从而计算出薄膜的残余应力. 通过对 仪器测量误差的考察和电弧离子镀(Ti, Al)N 薄膜残余应力的测定，证明了该方法的有效性.
A new method was put forward to determine the residual stresses of hard coatings. A set of optical lever system was designed to measure accurately the curvature of the sample bended by the stresses of the films, and then the residual stress can be calculated. Through detecting the error of the measuring equipment and testing the residual stresses in (Ti,Al)N films deposited using by arc ion plating, the effectiveness of the method was exhibited.
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