采用射频溅射法在单晶硅衬底上制备了 (Fe88Zr7B5) 0.97Cu0.03非晶软磁合金薄膜样品, 对沉积态样品的软磁性能和巨磁阻抗(GMI)效应进行了实验研究与机理分析． 结果表明, 未掺Cu元素的Fe88Zr7B5沉积态合金薄膜几乎无 GMI效应, 而掺了适量Cu元素的(Fe88Zr7B5) 0.97Cu0.03 合金薄膜在沉积态下即具有显著的GMI效应．在13 MHz频率下, 最大纵向磁 阻抗比达17%, 最大横向磁阻抗比为11%, 这表明 (Fe88Zr7B5) 0.97Cu0.03非晶合金薄膜在沉积态已具备优异的软磁性能和巨磁 阻抗效应．同时讨论了该薄膜样品的巨磁阻抗效应随频率的变化特性.
The soft magnetic properties and giant magnetoimpedance (GMI) effect of the amorphous films of Fe88Zr7B5 and (Fe88Zr7B5)0.97Cu0.03 prepared by radio frequency sputtering on the substrate of single crystal Si have been measured. Significant results obtained is that the GMI effect almost can not be detected in the as-deposited Fe88Zr7B5 films, while it becomes evident for as-deposited (Fe88Zr7B5) 0.97Cu0.03 films. The maximum values of longitudinal and transverse GMI ratio are 17% and 11% at the frequency of 13 MHz, respectively, indicating that the amorphous (Fe88Zr7B5) 0.97Cu0.03 films have good soft magnetic properties and GMI effect even though in the as-deposited state.
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