Effect of Magnetic Field on the Deposition of Transparent Diamond-Like Carbon ( DLC ) Films by RF-PCVD

材料保护, 2004, 37(z2): 100-103.

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1.Guangzhou Research Institute of Nonferrous Metals, Guangzhou 510651, China

2.Guangzhou Research Institute of Nonferrous Metals, Guangzhou 510651, China

3.Guangzhou Research Institute of Nonferrous Metals, Guangzhou 510651, China

4.Guangzhou Research Institute of Nonferrous Metals, Guangzhou 510651, China

5.Guangzhou Research Institute of Nonferrous Metals, Guangzhou 510651, China

Effect of Magnetic Field on the Deposition of Transparent Diamond-Like Carbon ( DLC ) Films by RF-PCVD

Keywords： diamond-like carbon

In order to deposit transparent and hard DLC films, magnetic field was introduced to enhance the plasma density of radiofrequency plasma chemical vapor deposition (RF-PCVD). In this paper, the configuration and computation of external magnetic field B are introduced. The restriction effect of magnetic field B on the charged particles and the effect of magnetic field B on the primary parameters-nonindependent power Pf and self-bias Uz were also studied. The mechanism of how magnetic field B affects self-bias Uz was analyzed.

参考文献

[1]	Felolman.US Assessment of the New Technology in Japan[M].NIST special publication,1991:897.

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Effect of Magnetic Field on the Deposition of Transparent Diamond-Like Carbon ( DLC ) Films by RF-PCVD

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