TWO-DIMENSIONAL NUMERICAL ANALYSIS OF PLASMA IMMERSION ION IMPLANTATION OF CYLINDRICAL BORES

金属学报(英文版), 2000, 13(2): 740-745.

TWO-DIMENSIONAL NUMERICAL ANALYSIS OF PLASMA IMMERSION ION IMPLANTATION OF CYLINDRICAL BORES

A. G. Liu , X.F. Wang , L.P. Wang , S. Y. Wang , B. Y. Tang and P.K. Chu 1) Advanced Welding Production Technology National Key Laboratory , HIT , Harbin 150001 , China 2) Department of Physics and Material Science , City University of Hong Kong , 83 Tat Chee Avenue , Kowloon , Hong Kang , China

Keywords： plasma immersion ion implantation , null , null , null

Plasma immersion ion implantation (PIII), unrestricted by sight-light process, is considered a proper method for inner surface strengthening. Two-dimensional simulation oj inner surface PIII process of cylindrical bores were carried out in this paper using cold plasma fluid model, and influence of the bore's dimension on impact energy, retained dose and uniformity of inner surface were investigated.

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