为开发适用于干式切削的既硬又润滑的涂层,采用磁控溅射工艺制备调制周期厚度为20nm的CrAlN/VN多层膜结构涂层,研究不同CrAlN/VN调制比对涂层性能的影响;利用场发式电子探针(FE-EPMA)、掠入射X射线衍射分析仪(GIXRD)、场发式扫描电镜(FE-SEM)、透射电子显微镜(TEM)和X射线光电子能谱仪(XPS)表征涂层的微观结构和化学组成;利用纳米压痕仪表征涂层的纳米硬度和弹性模量;利用Ball-on-disc磨耗试验仪表征涂层的摩擦因数.结果表明:当CrAlN/VN的调制比为1∶2时,涂层具有最高硬度(21.8GPa);涂层与碳化钨合金的摩擦因数最低为0.26.随着CrAlN/VN调制比的增大或减小,伴随着CrAlN或VN子层厚度减薄,涂层的硬度有增强的趋势;随着VN含量的增加,涂层的摩擦因数略有下降.
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