随着微机械加工技术的不断进步以及微机械加速度计市场占有率的逐步扩大,各种类型的微机械加速度计层出不穷,其中以电容检测式微机械加速度计发展的最为迅速且产业化水平最高,其次是压阻式、压电式、热对流式、隧道电流式、谐振式,以及近年来成为研究热点的光学式加速度计.本文详细阐述了国内外已报道的各种类型微机械加速度计的结构、原理、制造工艺和性能指标,并对不同精度微机械加速度计的产业化发展现状和市场应用情况进行了总结.新材料、新机理、纳米尺度、智能化以及更高的性能指标将是今后几年微机械加速度计的主要发展趋势,也将在MEMS/NEMS领域掀起新一轮的研究热潮.
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