应用1.4 MeV电子束对单向可控硅晶圆芯片进行固定注量率辐照，通过触发电流和少子寿命表征辐照效应，研究了退火工艺对辐照效应的影响。结果表明：电子辐照缩短单向可控硅少子寿命，增大触发电流。经350℃退火后触发电流恢复到辐照前水平，少子寿命虽有一定恢复，但远比辐照前短。在试验的注量范围内k系数为常数，退火后k系数与注量相关，小注量时较小。常温存放对辐照效应有较大影响，长时间存放不利于200℃退火而有利于300℃退火。
The annealing process of silicon controlled rectifier ( SCR) after irradiation were studied. SCR wafer was irradiated by 1. 4 MeV electronic beam with fixed fluence rates. Then the triggering current and minority carrier lifetime of SCR were measured. The experimental results show that the value of minority carrier lifetime is decrease and the value of triggering current is increase after irradiation. After annealing at 350℃, the triggering current of SCR was recovered to the level before irradiation. The minority carrier lifetime was recovered, but the value was far lower than that before irradiation. In irradiation fluence range of the experiment, the k was constant. After annealing process, the k coefficient was related to irradiation fluence. Under low irradiation fluence, the k coefficient was small. Storage at room temperature brought large influence on the irradiation effect of SCR. Long time storage had favorable influence on the annealing effect at 300 ℃, and unfavorable influence on the annealing effect at 200 ℃.
参考文献
| [1] | Nakabayashi M;Ohyama H;Shitogiden H;Ueno R;Miyagawa Y;Hirao T;Shigaki K;Kudou T;Simoen E;Claeys C.Effect of deep levels and interface states on the minority carrier lifetime control of trench-IGBTs by electron irradiation[J].Physica, B. Condensed Matter,20060(0):395-398. |
| [2] | 陈祖良;岳巍;李兆龙;章月红;谢裕颖;吴华妹.电子辐照改善双极型开关晶体管反向击穿特性[J].半导体技术,2014(12):943-946. |
| [3] | 赵善麒.高能电子束辐照改善电力半导体器件特性研究[J].固体电子学研究与进展,1998(1):64. |
| [4] | 邹睿;林理彬.多束质子辐照晶闸管的退火研究[J].半导体技术,2001(11):71-73. |
| [5] | 陈祖良;李兆龙;岳巍;王华明;何明明;毛咏甬;项延赵.电子辐照改善可控硅触发性能的研究[J].能源工程,2015(1):1-6. |
| [6] | 梁李敏;解新建;郝秋艳;田园;刘彩池.退火对电子辐照氮化镓光电性能的影响[J].人工晶体学报,2012(6):1524-1527. |
| [7] | 钟志亲 .6H-SiC的辐照效应研究[D].四川大学,2007. |
| [8] | 郭帆;何小平;王海洋;贾伟.晶闸管触发开通特性[J].强激光与粒子束,2012(10):2483-2487. |
| [9] | 罗方颖 .注入水平对少子复合行为影响的研究[D].浙江大学材料科学与工程学系,2010. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%