采用阳极型气体离子源结合非平衡磁控溅射的方法,在单晶硅及Ti6Al4V钛合金基体上制备掺钨类金刚石多层膜(DLC/WC),利用俄歇电子谱(AES)、透射电镜(TEM)、X射线光电子能谱(XPS)及X射线衍射(XRD)等对膜层的过渡层、界面及微观结构进行研究.结果表明:所制备的膜层厚2.7μm,硬度高达3550HV,摩擦因数为0.139,与Ti6Al4V基体结合力为52 N;W主要以纳米晶WC的形式与非晶DLC形成WC/DLC多层膜,该多层膜仍呈现出类金刚石膜的主要特征.
@@@@Anodic gas ion beam source (IBS) and unbalance magnetron sputtering (UBM) were employed to deposit diamond-like carbon/WC (DLC/WC) multilayer film on Si. Auger electron spectroscopy (AES), transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), X-ray diffractometry (XRD) and microhardness tester were employed to evaluate the interface, microstructure and composition of films. The results show that the film thickness is 2.7μm, hardness up to 3 550HV, the friction coefficient is 0.139, and adhesion strength is 52 N in Ti6Al4V substrate. In the film, nanocrystalline WC and amorphous DLC layer overlap the formation of DLC/WC multilayers. The multilayer film still shows that the main features, which are very similar to the DLC film.
参考文献
| [1] | 用离子源技术制备类金刚石膜研究[J].中国表面工程,2005(05):16-19. |
| [2] | ROBERTSON J .Diamond-like amorphous carbon[J].Material Science and Engineering,2002,R37:129-281. |
| [3] | 杨兵初,聂国政,李雪勇.类金刚石薄膜的电子结构及光学性质[J].中国有色金属学报,2006(06):989-993. |
| [4] | 代明江,林松盛,候惠君,李洪武.类金刚石膜的性能及其在模具上的应用[J].模具制造,2005(09):54-56. |
| [5] | 肖晓玲,洪瑞江,林松盛,李洪武,侯惠君.非平衡磁控溅射沉积TiC/a-C多层膜的组织结构[J].材料科学与工程学报,2008(05):684-687,672. |
| [6] | 牛仕超,余志明,代明江,林松盛,候惠君,李洪武.Cr/CrN/CrNC/CrC/Cr-DLC梯度膜层的研究[J].中国表面工程,2007(03):34-38. |
| [7] | 林松盛,代明江,侯惠君,李洪武,朱霞高,林凯生.掺钛类金刚石膜的微观结构研究[J].真空科学与技术学报,2007(05):418-421. |
| [8] | Fu Zhi-qiang;Wang Cheng-biao;Wang Wei;Peng Zhi-jian;Yu Xiang;Lin Song-sheng;Dai Ming-jiang.W-doped DLC Films by IBD and MS[J].Key engineering materials,2010:477-480. |
| [9] | Mirjana Petersen;Ulrike Heckmann;Ralf Bandorf .Me-DLC films as material for highly sensitive temperature compensated strain gauges[J].Diamond and Related Materials,2011(5/6):814-818. |
| [10] | Mirjana Petersen;Ulrike Heckmann;Ralf Bandorf .Me-DLC films as material for highly sensitive temperature compensated strain gauges[J].Diamond and Related Materials,2011(5/6):814-818. |
| [11] | Masami, I.;Haruho, M.;Tatsuya, M.;Junho, C. .Low temperature Si-DLC coatings on fluoro rubber by a bipolar pulse type PBII system[J].Surface & Coatings Technology,2011(5):999-1002. |
| [12] | Shanhong Wan;Liping Wang;Junyan Zhang;Qunji Xue .Field Emission Properties Of Dlc And Phosphorus-doped Dlc Films Prepared By Electrochemical Deposition Process[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2009(6):3817-3821. |
| [13] | Khadro, B.;Sikora, A.;Loir, A.-S.;Errachid, A.;Garrelie, F.;Donnet, C.;Jaffrezic-Renault, N. .Electrochemical performances of B doped and undoped diamond-like carbon (DLC) films deposited by femtosecond pulsed laser ablation for heavy metal detection using square wave anodic stripping voltammetric (SWASV) technique[J].Sensors and Actuators, B. Chemical,2011(1):120-125. |
| [14] | CHOU Chau-chang;WU Yi-yang;LEE Jyh-wei;YEH Chi-hsiao, HUANG Jen-ching.Characterization and haemocompatibility of fluorinated DLC and Si interlayer on Ti6Al4V[J].Surface and Coatings Technology,2012 |
| [15] | Mukhtar H. Ahmed;John A. Byrne .Effect of surface structure and wettability of DLC and N-DLC thin films on adsorption of glycine[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2012(12):5166-5174. |
| [16] | Paik N .Raman and XPS studies of DLC films prepared by a magnetron sputter-type negative ion source[J].Surface & Coatings Technology,2005(7):2170-2174. |
| [17] | E. Bertran;C. Corbella;A. Pinyol .Comparative study of metal/amorphous-carbon multilayer structures produced by magnetron sputtering[J].Diamond and Related Materials,2003(3/7):1008-1012. |
| [18] | 陈德军;代明江;林松盛;李洪武 侯惠君 .纳米多层膜机械性能研究进展[J].模具工程,2007,70/71:29-33. |
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