A Full CMOS Integration Including ISFET Microsensors and Interface Circuit for Biochemical Applications

稀有金属材料与工程, 2006, 35(z2): 443-446.

Jinbao Wei ^1, , Haigang Yang ^2, , Hongguang Sun ^3, , Zengjin Lin ^4, , Shanhong Xia ^5,

1.The State Key Lab of Transducer Technology, Institute of Electronics, CAS, P.O. Box 2652, Beijing 100080, China;Graduate University of the Chinese Academy of Sciences, Beijing 100039, China

2.The State Key Lab of Transducer Technology, Institute of Electronics, CAS, P.O. Box 2652, Beijing 100080, China

3.The State Key Lab of Transducer Technology, Institute of Electronics, CAS, P.O. Box 2652, Beijing 100080, China;Graduate University of the Chinese Academy of Sciences, Beijing 100039, China

4.The State Key Lab of Transducer Technology, Institute of Electronics, CAS, P.O. Box 2652, Beijing 100080, China;Graduate University of the Chinese Academy of Sciences, Beijing 100039, China

5.The State Key Lab of Transducer Technology, Institute of Electronics, CAS, P.O. Box 2652, Beijing 100080, China

基金项目: The project was supported by National Natural Science Foundation of China (90307014)

A Full CMOS Integration Including ISFET Microsensors and Interface Circuit for Biochemical Applications

Keywords： ISFET

One of today's challenges is the integration of ISFETs in chemical and biochemical Microsystems. This article presents a full integration of ISFET chip containing the ISFET/REFET (reference FET) pair, ISFET/REFET amplifiers, bias current generator, as well as a reference electrode structure, all integrated on the same chip based on CMOS technology. The sensor chip was fabricated in a standard 0.35 μm CMOS process (Chartered Semiconductor, Singapore). The extra post processing steps have been developed and added for depositing membranes. Finally, the pH response of the integrated sensor was measured with the interface circuit.

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A Full CMOS Integration Including ISFET Microsensors and Interface Circuit for Biochemical Applications

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