采用低压化学气相沉积法(LPCVD)在Cu箔上制备出了单层石墨烯纳米结构,用扫描电子显微镜(SEM)、原子力显微镜(AFM)和拉曼光谱等对其结构和形貌等进行了表征.在此基础上,通过调节生长参数,制备多种形貌的石墨烯结构,着重探索了在生长温度为1000℃、生长时间为2 min时,CH4∶H2、生长压强和衬底晶体取向对石墨烯初始形貌的影响规律,石墨烯的形貌主要取决于C的扩散/沉积和H2对石墨烯的刻蚀,当氢气的刻蚀作用占主导地位时,石墨烯为规则的六边形,当C的扩散/沉积占主导作用时,C沿着特定的方向扩散快,形成花状形貌;而背电子散射衍射(EBSD)研究表明,衬底Cu箔的取向对石墨烯形貌的影响不明显,没有观察到衬底取向与石墨烯结构之间的直接联系.
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